CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY

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Editor-in-chief

LIU Yichun

Academician of Chinese Academy of Sciences,

Northeast Normal University

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Organization

China Association for Science and Technology

Chinese Vacuum Society

About the Journal

Chinese Journal of Vacuum Science and Technology (CJVST) is national level scientific journal operated by the Chinese Vacuum Society and approved by the Chinese Association for Science and Technology. CJVST pressed the first volume in 1981. Since then, CJVST has been listed as a Chinese Science Citation Database (CSCD) journal and Chinse Core Journal. CJVST publishes Chinese and English research papers on vacuum acquisition, improvement, testing, and application, involving the intersection of physics, chemistry, engineering, materials, biology and other disciplines.

Cover Aticle

Investigation of Thermo-Oxidative Aging Effects on Sealing Performance of Spacecraft Elastomeric Seals

Design and Application of Multi-Species Gas Leak Detector Based on Quadrupole Mass Spectrometer Analyzer

Tactful Use of Low Angle Electrons in Scanning Electron Microscope

Research Progress of High-Pressure Cryopreservation for Multiscale Living Materials

Advances in Cryopreservation of Tissues and Organs

more..

Current Issue Archive Online First Most Cited Most Download

Issue 06,2025

The Novel Design of Vacuum Safety Interlock System for New Beamline at Hefei Light Source

LIU Qun;CHEN Liuguo;LI Fang;JIA Wenhong;WANG Xiao;HE Bo;

The vacuum safety interlock system of the beamline station is an important basis for guaranteeing the safe operation of the storage ring and the safety of equipment on the beamline station. The latest design method of the vacuum safety interlock system for the beamline and its stations, which is being newly built at Hefei Light Source is introduced. Based on the latest programmable logic controller(PLC) and virtualization technologies under the architecture of the open software platform EPICS 7(Experimental Physics and Industrial Control System), a new vacuum safety interlock system for the beamline and its stations has been developed. In the development of the operator interface(OPI) for remote control of the system, a Python script is used to automatically generate OPI with one click, which improves the efficiency of system development. Overall, this design improves the system performance and user experience of human-computer interaction while ensuring the safety and reliability of the system. These design methods provide technical reserves and practical experience for the control of the beamline at the Hefei Advanced Light Facility under construction.

Issue 06 ,2025 v.45 ;
[Downloads: 48 ] [Citations: 0 ] [Reads: 0 ] HTML PDF Cite this article

Application of Highly Accelerated Life Test in Reliability Test of Cracker Source

CHEN Dongdong;GUO Wei;ZHANG Zhufeng;XIE Binping;GAO Hanchao;

The cracker source is the core component of ultra-high vacuum molecular beam epitaxy(MBE)equipment, which can be used to grow a variety of III-V semiconductor materials epitaxy such as GaAs, InP, GaSb,etc. Because the ultra-high vacuum is not easy to obtain during the use of MBE, the reliability of the cracker source is very high. In this paper, the principle and method of high stress acceleration test of arsenic cracker source for molecular beam epitaxy equipment are discussed, and the corresponding acceleration test scheme is designed according to the characteristics of the cracker source. Based on the high temperature stress acceleration model, the acceleration factor was determined, the acceleration test profile was developed, and the mean time between failure(MTBF) value of the cracker source was determined to be greater than 5000 h according to the test scheme. The scheme provides a reference for engineering applications for the reliability verification of vacuum devices and scientific instruments with high reliability index and tight number of samples tested.

Issue 06 ,2025 v.45 ;
[Downloads: 63 ] [Citations: 0 ] [Reads: 0 ] HTML PDF Cite this article

Investigation of Thermo-Oxidative Aging Effects on Sealing Performance of Spacecraft Elastomeric Seals

SHI Jijun;WANG Lina;SUN Lichen;ZHANG Jin;GUO Fei;QI Lei;LIU Enjun;GUO Chongwu;

The sealing performance serves as a critical indicator for spacecraft rubber sealing systems, where the degradation behavior of rubber materials directly determines the service life of these systems. Current research on rubber sealing performance evolution primarily focuses on qualitative studies of macroscopic contact properties or specific mechanical property variations, with limited quantitative investigations on leakage rate calculations based on seal leakage channels. This paper establishes a microscopic leakage model for spacecraft-grade ethylenepropylene-diene monomer(EPDM) rubber by analyzing interfacial leakage channels and molecular flow characteristics of the gas, with theoretical leakage rate calculations validated through experimental measurements.The compression set of rubber materials was tested using time-temperature equivalence theory, and a thermaloxidative aging mathematical model was developed for lifespan prediction. Stress-strain constitutive relationships were obtained for rubber materials subjected to various thermal-oxidative aging conditions, with the measured relationships incorporated into finite element models for sealing performance analysis. A microscopic leakage model considering thermal-oxidative aging effects was established by analyzing pre-/post-aging surface micro-morphology and calculating contact pressure/width variations. Leakage rates under different thermal-oxidative aging conditions were calculated, with experimental leakage rate measurements validating the theoretical results.

Issue 06 ,2025 v.45 ;
[Downloads: 92 ] [Citations: 0 ] [Reads: 0 ] HTML PDF Cite this article

Simulation on the Photoionization Source of Mass Spectrometry by NS-DSMC Method

GAO Shijun;HUANG Jun;HE Ziyang;BI Hailin;WANG Xudi;LIU Chengyuan;YANG Jiuzhong;XU Minggao;PAN Yang;

Understanding the gas dynamics characteristics of the mass spectrometry(MS) ion transport system is important for improving the sensitivity of MS instruments. Based on the coupled of the Navier-Stokes equation and the Direct Simulation Monte Carlo method, the flow field characteristics of the gas from the atmospheric pressure continuous flow to the vacuum rarefied flow can be calculated. Further coupling with the electric field simulation, ions' transportation, and spatial distribution information can be obtained, and the performance of ion optical devices can be evaluated. Based on photoionization mass spectrometry, this work constructed a combined structural model of capillary injection, photoionization source, and sampling cone, established a multi-physics simulation method for ion transportation across flow regimes, obtained the effects of two types of structured photoionization source electrodes on the ion transportation efficiency, and verified the reliability of the simulation method using a self-made photoionization time-of-flight mass spectrometer. This work provides theoretical guidance for the design of mass spectrometry photoionization sources and ion transportation instruments under complex flow and electric field environments.

Issue 06 ,2025 v.45 ;
[Downloads: 78 ] [Citations: 0 ] [Reads: 0 ] HTML PDF Cite this article

Simulation of the Uniformity Influence of Effusion Cell Structure and Layout in Molecular Beam Epitaxy

TAO Xiantong;DUAN Yingrui;LI Zhuangzhuang;SONG Liyuan;YANG Chunzhang;YANG Jin;LI Yanhui;KONG Jincheng;ZHAO Jun;JI Rongbin;WANG Shanli;

Billion-pixel infrared detectors are an important direction for the development of next-generation infrared detectors, and the 8-inch high-uniform Hg1-x Cdx Te thin film has become the most crucial component of this technology. The structure and layout of molecular beam epitaxy(MBE) effusion cells are key factors influencing the composition and thickness uniformity of Hg1-x Cdx Te epitaxy films. This paper theoretically analyzes the beam flux generation and emission distribution of effusion cells based on requirements for large-area high-uniformity Hg1-xCdx Te epitaxial films. It simulates and calculates the impacts of effusion cell layout and the usage of source materials within the cells on the thickness uniformity of epitaxial thin films. This article takes a cylindrical channel effusion cell as an example and uses COMSOL Multiphysics to simulate the MBE growth process with different distances and different angles from the effusion cell of MBE, and the uniformity of the beam reaching the substrate is calculated. The results show that the beam flux decreases nearly linearly with source material consumption. The highest thickness uniformity is achieved when the angle is 46°; as the distance increases, the thickness uniformity becomes better, and after 300 mm, the thickness uniformity is within ±1.5%. This ensures the successful preparation of 8-inch highly uniform Hg1-x Cdx Te thin film.

Issue 06 ,2025 v.45 ;
[Downloads: 98 ] [Citations: 0 ] [Reads: 0 ] HTML PDF Cite this article

Current issue statistical data more>>

Application of the Octahedral Model Theory to Evaluating the Specific Surface Area of Porous Ceramic Foams

LIU Peisheng;CHENG Wei;YANG Chunyan;

Through appropriate mathematical processing， the author obtained the formula for calculating the specific surface area of porous materials based on the octahedral structure model. This paper looks into the specific surface area of some ceramic foam products in practice， so as to carry out a series of theoretical applications to verify the calculation formula. Not only ceramic foam products with various material species， but also those with different structures， were investigated correspondingly. The results show this characterizing relation can well calculate not only the specific surface area of ceramic foams with different material species， but also that with various structures. This reveals the formula has a good practical ability to calculate the specific surface area of ceramic foams， and proves the characterizing relation has a good practical ability to calculate the specific surface area of all porous materials， considering the good verification result to the metal foam.

Issue ;
[Downloads: 0 ] [Citations: 0 ] [Reads: 0 ] HTML PDF Cite this article

Structure Analysis and Optimization of Vacuum Pump Station of Horizontal Test Platform of Superconducting Acceleration Cryomodule

ZHAO Fan;LI Han;WEI Wei;YUE Tai;LI Jingguo;SUN Xingzhong;

In this paper， the beam vacuum pump station of the horizontal test platform of superconducting acceleration cryomodule is taken as the research object， structural simulation analysis and multi-objective optimization design are conducted to meet its requirements for safety and lightweight. Firstly， based on statics simulation and sub-model technology， the strength and stiffness of the vacuum pump station are analyzed and an optimization scheme is proposed. Subsequently， the test sample space is obtained through the Central Composite Design (CCD) method and parametric simulation， and the response surface analysis is conducted through the Kriging surrogate model. Finally， the multi-objective genetic algorithm (MOGA) is adopted to obtain the Pareto optimal solution， and the preferred scheme is simulated and verified. The results show that the maximum equivalent stress of the optimized vacuum pump station is 76.116 MPa， the maximum deformation is 0.47151 mm， and the mass of pump station is only increased by 0.25% compared with that before optimization. The optimization results meet the design requirements of multi-objective optimization， which proves the feasibility of the said multi-objective optimization method. This research can provide references for the design and optimization of vacuum chambers in the field of accelerators.

Issue ;
[Downloads: 14 ] [Citations: 0 ] [Reads: 0 ] HTML PDF Cite this article

Simulation of DC Magnetron Processing Based on a Combination of PIC/MCC and Sputtering Model

JIANG Luping;WEN Hui;ZHANG Quanzhi;

Magnetron sputtering， as an efficient and controllable physical vapor deposition technique， is widely applied in large-area thin film coating. This study employs a Particle-in-Cell/Monte Carlo Collision model to simulate the direct current planar magnetron discharge， combined with a Monte Carlo-based sputtering model to simulate target sputtering and the transport of sputtered atoms. Under a working pressure of 5 mTorr and an applied voltage of -300 V， the effects of magnetic field distribution (by varying the dimensions of the inner magnet in the magnetron target)， ion-induced secondary electron emission coefficient， and resistance on plasma characteristics and surface sputtering in magnetron discharge are systematically investigated. The results indicate that the confinement of electrons by orthogonal electromagnetic fields confines the plasma predominantly to regions where the magnetic field is parallel to the target surface. Compared to adjusting the width of the inner magnet， modifying its height exerts a more pronounced influence on the magnetic field distribution. Reducing the height of the inner magnet significantly shifts the position of the magnetic field parallel to the target surface， transforming the plasma density distribution from oblique to perpendicular to the target surface， thereby enhancing the vertical incidence of ions onto the target. Additionally， sputtered atoms exhibit nearly isotropic motion characteristics. As the substrate-to-target distance increases， the atomic flux reaching the substrate gradually decreases， but the uniformity improves significantly.

Issue ;
[Downloads: 6 ] [Citations: 0 ] [Reads: 0 ] HTML PDF Cite this article

Design and Performance Analysis of Adiabatic Supports Structure for Large-scale Cryogenic Test Platform

WU Qinghao;YANG Qingxi;SHI Genmu;

The Toroidal Field (TF) and Poloidal Field (PF) magnets are critical components of the International Thermonuclear Experimental Reactor (ITER). During the performance verification of the TF and PF magnets on the Magnet Cryogenic Test Bench (MCTB)， structural supports are required to maintain the magnets' positioning. To minimize the impact of excessive thermal loads generated by the supports on the experimental results， it is particularly crucial to optimize the design of their thermal insulation structures. Based on the structural characteristics of the TF and PF magnets， two different types of support structures were developed in this study， incorporating independent cooling plates combined with G10 insulation plates as the thermal insulation system. To evaluate the performance of the insulation structure， numerical simulations of the liquid helium outlet temperature were conducted using Fluent software. The obtained average temperatures at the channel walls were subsequently applied as boundary conditions in a steady-state thermal analysis using Workbench to calculate the thermal loads imposed on the magnets. Simulation results demonstrate that the designed insulation structures meet the thermal insulation performance requirements， providing a reference for the design and performance validation of support systems in large-scale cryogenic facilities.

Issue ;
[Downloads: 13 ] [Citations: 0 ] [Reads: 0 ] HTML PDF Cite this article

Advances on Temperature Field Simulation of Vacuum Furnaces

ZHOU Mingxu;LI Jianchang;YUAN Hongfeng;GONG Zhigang;

Temperature field simulation is a key method for studying the temperature uniformity in a vacuum furnace， which significantly influences the stress and microstructure of workpieces. In this paper， we first review the methods of temperature measurement， and then summarize the usual finite element meshing and their applicable scenarios. A comparison of commonly used radiation models and their characteristics is conducted， summarizing the factors that influence the temperature field of furnace. In future studies， more efforts should be focused on the following aspects：1) Multiphysics coupling simulation and experiments are adopted to construct an integrated design database of ‘structure-temperature field-workpiece performance’. 2) The combination of the temperature field simulation and the neural network algorithm is implemented to achieve real-time temperature prediction and intelligent optimization. 3) To improve temperature uniformity， the modular approach should be adopted in the design of vacuum furnaces by optimizing the layout of the heating modules and enhancing the precision of the temperature monitoring/controlling modules.

Issue ;
[Downloads: 35 ] [Citations: 0 ] [Reads: 0 ] HTML PDF Cite this article

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Review of Film Growth by Sputtering Technology

Yang Wenmao~(1,2),Liu Yanwen~1,Xu Luxiang~1,Leng Yongxiang~1 and Huang Nan~(*1)(1.The School of Materials Science & Engineering,Southwest Jiaotong University,Chengdu,610031,China;2.Institute of Machinery Manufacturing Technology,CAEP,Mianyang,621900,China)

History and the latest propress in film deposition by magnetron sputtering was tentatively reviewed.Discussion was focused on design and evaluation of the magnetic field distribution,various types of power supply,multi-target positioning,film growth conditions and industrial applications of the technology.

Issue 03 ,2005 ;
[Downloads: 2,539 ] [Citations: 173 ] [Reads: 9 ] HTML PDF Cite this article

Measurement of TiN Film Substrate Interfacial Adhesion by Scratching

Qu Quanyan1,2,Qiu Wanqi1,Zeng Dechang1*,Liu Zhengyi1 (1.Depatment of Metal Materials Science and Engineering,School of Materials Science and Engineering,South China University of Technology,Guangzhou 510640,China;2.Guangdong Institute of Special Equipment Inspection,Guangzhou,510655,China)

The TiN films were deposited by vacuum multi-arc ion plating on WC-Co substrate.The scratch tracks made with a micro-scratch tester(MST) were characterized with an optical microscope and scanning electron microscope(SEM).The adhesion at the interface of the TiN films and the substrate were then evaluated by calculating the acoustic emission and frictional force data obtained with the MST,and the optical images and SEM micrographs of the scratches.The results show that neither acoustic emission spectra nor friction force curve can exclusively determine the adhesion strength;the critical load and the interfacial adhesion can only be precisely evaluated by combining the acoustic emission spectra,the friction force curve and the Scratch truck morphologies.The measured result with the MST agrees well with that obtained with WS-92 scratch tester.

Issue 02 ,2009 v.29 ;
[Downloads: 2,380 ] [Citations: 118 ] [Reads: 7 ] HTML PDF Cite this article

UNBALANCED MAGNETRON SPUTTERING AND ITS APPLICATIONS

Dong Qi(Beijing Greatwall Ti-Gold Corporation, Beijing, 100080)Fan Yudian(Department of Materials Science,Tsinghua University, Beijing, 100084 )

Magnetron sputtering has beconle a widely used physical vapor deposition technique due to itsoutstanding features. While the parallel magnetic fleId on a standard magnetron target strongly restricts thee1ectrons and in turn ions nearby frorn escaPing towards substrates,resulting in a quite low plasma density incoating area,which makes the benefit of using the magnetron sputtering technique Iost to some extent. Bystrengthening or weakening the magnetic flux from one fo the two opposite magnetic poles in order to establish an unbalanced magnetic field,one couId greatly enhance the plasma density in the coating area and irnprove the properties of deposlted films. This paper presents the deve1opment and the prosperity of this technique.

Issue 01 ,1996 ;
[Downloads: 1,297 ] [Citations: 111 ] [Reads: 9 ] HTML PDF Cite this article

Photo induced Catalytic Characteristics of TiO₂ Thin Films Deposited by DC Reactive Magnetron Sputtering

Dong Hao,Zhang Yongxi,Yang Xiliang,Shen Jie,Chen Huaxian,Jiang Yiming,Gu Yuanzhuang,Zhang Zhuangjian (Dept.of Materials Science,Fudan University,Shanghai,200433)

TiO 2 thin films were grown on glass substrate by DC reactive magnetron sputtering in a mixture of argon and oxygen with an O/Ar ratio of 1∶2.During the film growth the pressure varied from 0 5 to 6 65 Pa;the substrate temperatures ranging from 100 to 400 ℃ in the film growth and the film thickness was in the range of 140 to 1100 nm.The X ray diffraction analysis of the films shows that the films have an anatase crystal structure or a mixture of anatase and rutile.Films grown at higher substrate temperatures in an appropriate sputtering pressure and thicker films exhibit better photo induced catalystic characteristics after ultra violet radiation.

Issue 04 ,2000 ;
[Downloads: 832 ] [Citations: 109 ] [Reads: 11 ] HTML PDF Cite this article

Review of Pulsed Laser Deposition Film Growth Technology

Ji Ming,Song Quansheng,Zeng Xiaoyan (National Key Laboratory for Laser Technology,Huazhong University of Science and Technology,Wuhan,430074,China)

The latest progress of pulsed laser deposition (PLD) film growth technology was reviewed.The discussion with specific examples is divided into three parts:PLD mechanism,its technical procedures and its applications in growth of thin film materials.The possible modification and potential applications in high tech were also tentatively discussed.

Issue 01 ,2003 ;
[Downloads: 1,349 ] [Citations: 92 ] [Reads: 9 ] HTML PDF Cite this article

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Research Progress and Application Status of Electromagnetic Metamaterials

GUO Yang;DU Shuo;HU Sha;LI Ce;YANG Shengyan;GU Changzhi;

Usage of electromagnetic waves for transmitting energy and information has always been a research topic of great concern and interest, owing to their important role in many application fields, such as communication,energy, environment, medicine and so on. In recent years, with the development of micro/nano-fabrication technology, metamaterials have emerged and provided new ideas and opportunities to solve the bottleneck problems of traditional electromagnetic technology, such as large volume of optical-paths, complex structure, single function etc.Thanks to the strong ability to control electromagnetic waves, these materials can not only enable various functions of traditional optical elements, but also bring out some novel electromagnetic responses that do not exist in nature.Herein, the recent advances in metamaterials are briefly reviewed and classified from the viewpoint of the degrees of freedom of electromagnetic waves. At last, we will discuss something about active metamaterials based on phase transition materials.

Issue 09 ,2022 v.42 ;
[Downloads: 3,861 ] [Citations: 19 ] [Reads: 8 ] HTML PDF Cite this article

Latest Development and Application Prospects of Atomic Layer Deposition Technology

Wei Hehe;He Gang;Deng Bin;Li Wendong;Li Taishen;School of Physics and Materials Science,Radiation Detection Materials&Device Fabrication Lab,Anhui University;

The latest development of atomic layer deposition(ALD)technology was tentatively reviewed.ALD has beenwidely used in fabrication of a variety of electronics chips,optical devices,sensors,and solar cells because ALD is capable of depositing highly pure homogenous filmswithwell-controlled filmthickness and chemical contents.The discussions focused on: i)the principle of ALD technology,its characteristics,and technical advantages; ii)the mechanisms of chemical self-limiting(CS)and response self-limiting(RS),and possible ways to achieve ALD,such as thermal-ALD(TALD),plasma-enhanced ALD(PE-ALD),electro chemical ALD(EC-ALD),and etc.;iii)its applications in synthesis of high k materials,interconnectingmaterialsforintegrated circuit(IC),nanostructuredmaterials,optical films and catalysts. The development trends of ALD technology and its potential applicationswere also briefly discussed.

Issue 04 ,2014 v.34 ;
[Downloads: 3,664 ] [Citations: 50 ] [Reads: 10 ] HTML PDF Cite this article

Review of Film Growth by Sputtering Technology

Issue 03 ,2005 ;
[Downloads: 2,539 ] [Citations: 173 ] [Reads: 9 ] HTML PDF Cite this article

Latest Progress in Surface Modification of Cutting Tools with Coatings

Wang Tiegang;Zhang Jiaojiao;Yan Bing;Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing,Tianjin University of Technology and Education;

The latest development in surface modification of cutting tools with thin films to improve the mechanical properties was tentatively reviewed. The discussions with specific examples centered on: i) the many technical strengths of coatings,including enhancement of erosion/corrosion/wear-resistance,hardness and elasticity,reduction of friction,oxidation and production cost,improvement of high temperature stability,machining precision,efficiency and service lifetime,especially in cutting Ti-alloy,super-alloy and hardened steels; ii) the advantages and disadvantages of industrial coating techniques,such as chemical vapor deposition,physical vapor deposition,and physical chemical vapor deposition; and iii) advanced coatings,including but not limited to the nano-composite/functional gradient coatings; and state-of-the-art coating techniques,such as high power impulse magnetron sputtering,ion beam assisted deposition andmagnetic filtered arc ion plating. The development trends,problems and possible solutions of coating materials and coating techniques were also discussed in a thought provoking way.

Issue 07 ,2017 v.37 ;
[Downloads: 2,478 ] [Citations: 63 ] [Reads: 7 ] HTML PDF Cite this article

XRD ANALYSIS METHOD FOR POLYCRYSTALLINE THIN FILMS AND SURFACE LAYERS

Tao Kun; Luo Jian(Institute of Materials Science,Tsinghua University,Beijing)Xu Yumin(Department of Biological Science and Technology,Tsinghua University, Beijing)

The powder diffraction geometry of thin films, diffraction intensity of asymmetric parallel beam method and Seemann-Bohlin method are analyzed, The advances,applications and difficulties on powder diffraction of thin films are discussed. Two quantitative and non-destructive XRD methods are presented to do depth profile analysis for polycrystalline thin films and surface layers,in which the characteristic parameters vary continuously in depth direction.

Issue 05 ,1995 ;
[Downloads: 2,401 ] [Citations: 5 ] [Reads: 8 ] HTML PDF Cite this article

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Congratulations to the 16 editorial board members of the Journal of Vacuum Science and Technology for being selected as the "Global Top 2% Scientists"!

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Congratulations to the 7 editorial board members of the Journal of Vacuum Science and Technology for being selected as the 2022 Elsevier " Highly Cited Chinese Researchers"

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211 National Societies of the China Association for Science and Technology jointly issued the Academic Publishing Ethics Convention

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Advances in Cryopreservation of Tissues and Organs

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CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY

Editor-in-chief

WeChat

Organization

About the Journal

Cover Aticle

The Novel Design of Vacuum Safety Interlock System for New Beamline at Hefei Light Source

Application of Highly Accelerated Life Test in Reliability Test of Cracker Source

Investigation of Thermo-Oxidative Aging Effects on Sealing Performance of Spacecraft Elastomeric Seals

Simulation on the Photoionization Source of Mass Spectrometry by NS-DSMC Method

Simulation of the Uniformity Influence of Effusion Cell Structure and Layout in Molecular Beam Epitaxy

Application of the Octahedral Model Theory to Evaluating the Specific Surface Area of Porous Ceramic Foams

Structure Analysis and Optimization of Vacuum Pump Station of Horizontal Test Platform of Superconducting Acceleration Cryomodule

Simulation of DC Magnetron Processing Based on a Combination of PIC/MCC and Sputtering Model

Design and Performance Analysis of Adiabatic Supports Structure for Large-scale Cryogenic Test Platform

Advances on Temperature Field Simulation of Vacuum Furnaces

Review of Film Growth by Sputtering Technology

Measurement of TiN Film Substrate Interfacial Adhesion by Scratching

UNBALANCED MAGNETRON SPUTTERING AND ITS APPLICATIONS

Photo induced Catalytic Characteristics of TiO₂ Thin Films Deposited by DC Reactive Magnetron Sputtering

Review of Pulsed Laser Deposition Film Growth Technology

Research Progress and Application Status of Electromagnetic Metamaterials

Latest Development and Application Prospects of Atomic Layer Deposition Technology

Review of Film Growth by Sputtering Technology

Latest Progress in Surface Modification of Cutting Tools with Coatings

XRD ANALYSIS METHOD FOR POLYCRYSTALLINE THIN FILMS AND SURFACE LAYERS

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Journal Dynamics

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