CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY

LIU Ming

Academician of Chinese Academy of Sciences

Institute of Microelectronics of the Chinese Academy of Sciences

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Inquiries about manuscript processing, such as manuscript review, copyright transfer agreement, revision, and online publication

cjvst@cvs.org.cn

010-62704910

(Ms. Lang)

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cjvst@cvs.org.cn

010-62704910

(Ms. Huo)

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cjvst-finance@cvs.org.cn

010-62704824

(Ms. Sun)

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cjvst@cvs.org.cn

010-62704910

(Mr. Zhang)

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cjvst@cvs.org.cn

010-62704910

(Mr. Zhang)

Executive editor: Ma Honghong

Assistant editor: Lang Chao

Tel: 010-62704910;010-62704824

Fax: 010-62704824

Address: Room II306, Building A, Institute of Physics, Chinese Academy of Sciences, Haidian District, Beijing, China (100190)